Electron beam evaporator Prevac

- The system is custom-designed together with Maciej Zgirski and Prevac company
- Base vacuum: 10^-10 mbar
- Electron beam voltage: 10 kV
- Indexer for 6 various materials
- Ion gun for sputtering
- Multi angle evaporation
- Fast sample loading (load-lock chamber)
- Thickness monitor

Fig. 1.
Evaporator lab. From left to right: Two control units. Main chamber with ion gun on the top and electron beam evaporator unit on the bottom. A sample manipulator allows you to control the angle of the stage relative to the material being evaporated. The load lock with loading arm (long pipe) is located on the right side of the main chamber.